Lithography
a) The relation of exposure dose and spot width (exposure: 1.5, 1.4... | Download Scientific Diagram
Ratio resolution and dose exemplarily shown for e-beam resist SX AR-N 7530/1
Exposure of Photoresists
Micromachines | Free Full-Text | Fabrication of Micro-Optics Elements with Arbitrary Surface Profiles Based on One-Step Maskless Grayscale Lithography
2.6.1 Contrast and Important Properties
Chris A. Mack, Fundamental Principles of Optical Lithography, (c) ppt video online download
Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers - ScienceDirect
Spatial modulation of nanopattern dimensions | EurekAlert!
a). Average develop ment rates versus exposure dose for ascending... | Download Scientific Diagram
Experimental values of and D F vs exposure dose for negative tone epoxy... | Download Scientific Diagram
1a:Thickness-dose characteristic of standard i-line photoresist (film... | Download Scientific Diagram
Independent-Exposure Method in Electron-Beam Lithography | IntechOpen
Resist-Wiki: Interferenzlithographie - Allresist DE
Process study and the lithographic performance of commercially available silsesquioxane based electron sensitive resist Medusa 82 - ScienceDirect
The relation between the photoresist film thickness after multiple dose... | Download Scientific Diagram
3.2.1 Focus Effects and Process Window
Independent-Exposure Method in Electron-Beam Lithography | IntechOpen
Lithography
Willson Research Group - Research - Double Exposure Lithography
Optical Lithography Method for Advanced Light Extraction in LEDs — LED professional - LED Lighting Technology, Application Magazine
Quantitative analysis and modeling of line edge roughness in near-field lithography: toward high pattern quality in nanofabrication
Exposure of Photoresists
Photolithography
Willson Research Group - Research - Double Exposure Lithography
Lithography
The relation between the photoresist film thickness after the... | Download Scientific Diagram
Micromachines | Free Full-Text | Innovative SU-8 Lithography Techniques and Their Applications
